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[1]李杨威,任成燕,孔飞,等.绝缘材料二次电子发射系数的测量及其影响因素研究进展[J].高压电器,2019,55(05):1-9.[doi:DOI:10.13296/j.1001-1609.hva.2019.05.001]
 LI Yangwei,REN Chengyan,KONG Fei,et al.Research Progress on the Measurement of Secondary Electron Emission Yield of Insulation Materials and Influencing Factors[J].High Voltage Apparatus,2019,55(05):1-9.[doi:DOI:10.13296/j.1001-1609.hva.2019.05.001]
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绝缘材料二次电子发射系数的测量及其影响因素研究进展()
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《高压电器》[ISSN:1001-1609/CN:61-11271/TM]

卷:
第55卷
期数:
2019年05期
页码:
1-9
栏目:
2018 高电压与放电等离子体专题
出版日期:
2019-05-20

文章信息/Info

Title:
Research Progress on the Measurement of Secondary Electron Emission Yield of Insulation Materials and Influencing Factors
作者:
李杨威12 任成燕23 孔飞2 刘俊标23 张燕1 邵涛23
(1. 河南理工大学机械与动力工程学院,河南焦作454000;2. 中国科学院电力电子与电气驱动重点实验室 (中国科学院电工研究所),?#26412;?00190;3. 中国科学院大学,?#26412;?00049)
Author(s):
LI Yangwei12REN Chengyan23KONG Fei2LIU Junbiao23ZHANG Yan1SHAO Tao23
(1. School of Mechanical and Power Engineering,Henan Polytechnic University,Henan Jiaozuo 454000,China;2. Key Laboratory of Power Electronics and Electric Drive,Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100190,China; 3. University of Chinese Academy of Sciences,Beijing 100049,China)
关键词:
绝缘材料初级电子二次电子电荷累积电荷中和
Keywords:
insulation materialprimary electronsecondary electroncharge accumulationcharge neutralization
DOI:
DOI:10.13296/j.1001-1609.hva.2019.05.001
摘要:
固体绝缘材料的二次电子发射现象会导致介质表面的电子倍增及电荷积累进而产生放电造成器件的 失效,准确测量固体绝缘材料的二次电子发射系数对于指导材料选型、评价材料性能具有重要的意义。文 中对比了绝缘与金属材料在二次电子产生、输运和发射过程的差异,总结了现有的绝缘材料二次电子发射 系数测量手段,分析了初级电子能量、束流、入射角度、材料表面状态及样品表面电荷积累对二次电子发射 特?#32536;?#24433;响。初级电子在绝缘材料中的平均自由行程远大于二次电子,所以初级电子激发的内二次电子只 有很少一部分能够逃逸为二次电子。绝缘材料的二次电子发射系数测量中,样品表面很容易积聚电荷,积 累的电荷从改变初级电子能量?#32479;?#23556;二次电子能量两个方面影响样品的二次电子发射,最终会达到一个出 射和入射动态平衡的带电状态。绝缘样品表面积聚电荷的中和是二次电子测量的难点,目前大多采用加热 法和电子束辐照法,不能定量的消除累积电荷。目前绝缘材料二次电子发射特性测量装置性能不一,可重 复性差,如何全面消除样品电荷累积对于提高测量装置的精度和可重复性具有重要意义。
Abstract:
The phenomenon of secondary electron emission of solid insulation materials will lead to electron multipli? cation and charge accumulation,and it will finally result in the failure of electrical device. The measurement of sec? ondary electron emission yield for solid insulation materials is important to guide material selection and evaluate ma? terial properties. The difference of secondary electron generation,transport,and emission between the insulation and metal materials is compared firstly in this paper. Then the existing measurement methods for secondary electron emis? sion yield of insulation materials are summarized. The influencing factors on the secondary electron emission mea? surement and surface charge accumulation,are analyzed,including the primary electron energy,beam current,in? cident angle,material surface state,and so on. The average free path of primary electrons in the insulation materials is much larger than that of secondary electrons,so only small part of secondary electrons excited by primary elec? trons could escape from the insulation surface. The accumulated charges will further affect the secondary electron emission of insulation surface by changing the primary and secondary electron energy. At last,it will reach a charged state of dynamic balance. Thus the charge neutralization is key technology in secondary electron measurement for in?sulation materials. The mostly used methods include heating and electron beam irradiation,but the quantitative elim? ination for the accumulated charge is still difficult. How to remove the accumulated charge effectively is important to improve the accuracy and repeatability of secondary electron emission measurement device.

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备注/Memo

备注/Memo:
收稿日期:2018?12?06; 修回日期:2019?02?01 基金项目:中国科学院科研仪器设备研制项目(YJKYYQ20170004);国家自然科学基金项目(51477163,51807189,U1830135)。 Project Supported by the Scientific Instrument Developing Project of the Chinese Academy of Sciences (YJKYYQ20170004), National Natural Science Foundation of China (51477163,51807189,U1830135).李杨威(1992—),男,硕士研究生,主要研究方向为固体 绝缘材料二次电子发射特性测量与分析技术。 任成燕(1979—),女,硕士,副研究员,硕士生导师,主要 从事高电压与绝缘技术、气体放电与等离子体应用研究(通 讯作者)。 孔飞(1987—),男,工学博士,从事高电压与绝缘技术、 放电等离子体应用等方面的研究。 邵涛(1977—),男,博士,研究员,教授,?#36867;?#38271;江学者 奖励计划青年学者,博士生导师,研究方向为高电压技术、脉 冲功率技术和放电等离子体应用。
更新日期/Last Update: 2019-05-20
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